Abstract: MEMS or Micro-Electro-Mechanical Systems are a combination of Electrical and Mechanical components inside mill to micro-scale chips. The components are generally integrated on a single chip by several microfabrication techniques. BIOMEMS is a subset of MEMS. It deals with MEMS used in the biological field. Bio-MEMS uses micro-sensors, transducers, actuators, and micromachines. It generally applies to biological systems and particularly human health. From any disease diagnosis to drug delivery, it’s only MEMS which made it easy for us to handle.

Keywords: BIOMEMS, Microfabrication, Micromachining

| DOI: 10.17148/IJIREEICE.2021.9109