Abstract: The design and modelling of a capacitive pressure sensor are presented in this work. High sensor sensitivities and resolutions have been accomplished using Micro Electro Mechanical Systems (MEMS) technology. Initial information on the simulation and design of such a sensor is provided in this report. The diaphragm deformation-induced capacitance change is used in capacitive sensing. A polycrystalline diaphragm that makes up the sensor deflects when pressure is applied to it. When pressure is applied, the 211m diaphragm deflects, altering the capacitance between the polysilicon diaphragm and silicon substrate. A high working pressure range and good linearity are achieved in the simulation of the MEMS capacitive pressure sensor in touch mode. To optimise the design, enhance the performance, and shorten the manufacturing process, Intellisuite software is used to model and simulate MEMS capacitive pressure sensors.
Keywords: Capacitive pressure sensor, MEMS, PolySilicon, Sensor
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