Abstract: The effect of microstructure on thermal stability and mechanical properties of co-sputtered deposited ZrWBN thin films on Si (100) substrates have been studied in detail. The power density of boron target has been varied from 0.1 to 7.5 W/cm2 to obtained films of varying microstructure. It was found that there were a lot of dislocations and twins generated in the composite. The process of dislocation or twin generation can dissipate much fracture energy and then increase the fracture toughness

Keywords: Mechanical, Nanocomposite, Ceramic, AL2O3/SIC